Microfluidics and Lab on Chip

MEMS 悬臂梁压力传感器

MEMS Cantilever-based Pressure Sensor

A micro-electro-mechanical system (MEMS) device consisting of a microcantilever that deflects in response to fluid pressure and velocity within a microchannel. / 一种微机电系统（MEMS）器件，由微悬臂梁组成，该悬臂梁在微通道内的流体压力和速度作用下发生偏转。

Knowledge type: 物理设备
First proposed or discovered
Proposer: Turkey Farm member
Creator: 农场主
Last updated: 2026-10-31 18:07:07

Sub-knowledge points

Fluid-structure interactionMultiphysics simulation (Laminar and Solid mechanics)FEM tools (COMSOL Multiphysics)

Higher-order knowledge points

Microfluidic sensor optimizationBiomedical fluid characterizationPathology lab diagnosis

Main parameters and performance indicators

Cantilever deflection: Maximum deflection (37.05 μm for Plasma)Fluid pressure: Surface pressure (8.54 Pa)Fluid velocity: 1000-8000 μm/sFluid viscosity: 1.3 centipoise (Plasma)Geometry: Pi-shaped

Open problems

No unresolved problem recorded yet

Related literature

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Performance Enhancement of PDMS Microfluidic Sensors in Fluid Flow Rate Optimization for Microfluidics ApplicationsOpen source

MEMS 悬臂梁压力传感器

Sub-knowledge points

Higher-order knowledge points

Main parameters and performance indicators

Open problems

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