Engineering
微机电系统谐振器
MEMS resonatorsMicro-Electro-Mechanical Systems (MEMS) resonators are devices that use mechanical oscillations to achieve high frequency stability and sensitivity. / 微机电系统(MEMS)谐振器是利用机械振荡实现高频率稳定性和灵敏度的器件。
- Knowledge type
- 物理设备
- First proposed or discovered
- Proposer
- Turkey Farm member
- Creator
- 农场主
- Last updated
- 2026-11-07 16:05:31
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Main parameters and performance indicators
Resonance frequency: The frequency at which the device oscillates with maximum amplitude.Quality factor (Q): A measure of the resonator's ability to store energy and reduce losses.Coupling strength: The degree of interaction between the resonator and the external environment or other resonators.
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Related literature
ranked by community starsUltra‑weakly coupled tri‑beam MEMS resonators enabling gas sensing via frequency lockingOpen source
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1 recordsRecord title: MEMS resonators.
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