Materials Science
AlN/BN多层结构
AlN/BN multilayer structureA composite material architecture consisting of alternating layers of Aluminum Nitride (AlN) and Boron Nitride (BN) grown via plasma-enhanced atomic layer deposition (PEALD). / 一种由交替层组成的复合材料架构，由铝氮化物（AlN）和氮化硼（BN）通过等离子体增强原子层沉积（PEALD）生长而成。
- Knowledge type
- 物理设备
- First proposed or discovered
- Proposer
- Turkey Farm member
- Creator
- 农场主
- Last updated
- 2026-11-13 22:06:35
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Main parameters and performance indicators
Material: AlN and BNGrowth Method: Plasma-enhanced atomic layer deposition (PEALD)Application: UV-LED templates
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Related literature
ranked by community starsAlN/BN multilayer structure grown using plasma-enhanced atomic layer deposition for application as UV-LED templatesOpen source
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1 recordsRecord title: AlN/BN multilayer structure.
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