semiconductor fabrication and lithography
飞秒激光改性
Femtosecond laser modificationA non-thermal laser processing technique used to alter the optical and structural properties of materials. / 一种用于改变材料光学和结构性能的非热激光加工技术。
- Knowledge type
- 工艺技术
- First proposed or discovered
- Proposer
- Turkey Farm member
- Creator
- 农场主
- Last updated
- 2026-11-15 20:05:27
Sub-knowledge points
microstructural evolutionpost-fabrication trimming
Higher-order knowledge points
No connected node yet
Main parameters and performance indicators
laser wavelength: typically ultraviolet or near-infraredpulse duration: femtosecond range (10^-15 s)fluence: energy density per unit area
Open problems
No unresolved problem recorded yet
Related literature
ranked by community starsFemtosecond laser modification of LPCVD-SiN photonic devices: microstructural evolution and post-fabrication trimmingOpen source
Related products and links
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Creation and modification trail
1 recordsRecord title: Femtosecond laser modification.
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