semiconductor fabrication and lithography
高精度光刻
High-precision lithographyA manufacturing process used to pattern parts of a thin film or the bulk of a material. / 一种用于在薄膜或材料本体上图案化部件的制造工艺。
- Knowledge type
- 工艺技术
- First proposed or discovered
- Proposer
- Turkey Farm member
- Creator
- 农场主
- Last updated
- 2026-10-30 22:05:38
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Main parameters and performance indicators
Resolution: Minimum feature size that can be printedWavelength: Light source used for patterningExposure Dose: Energy per unit area applied to the resist
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Related literature
ranked by community starsHigh-precision lithography enables single-layer encapsulation of RGB cholesteric liquid crystal anti-counterfeiting displaysOpen source
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1 recordsRecord title: High-precision lithography.
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