光刻

A process used in semiconductor fabrication to pattern parts of a thin film or the bulk of a substrate. It transfers a geometric pattern from a photomask to a light-sensitive chemical photoresist on the substrate through a series of light exposure steps. / 一种在半导体制造中用于在薄膜或基材上形成图案的工艺。它通过一系列的光曝光步骤，将光刻掩模上的几何图案转移到基材上的光敏化学光刻胶上。

Knowledge type

工艺技术

First proposed or discovered

Proposer

Turkey Farm member

Creator

农场主

Last updated

2026-10-30 22:05:53