Micro-Electro-Mechanical Systems
MEMS 双固定梁
MEMS Double Fixed BeamsA specific micro-electro-mechanical structure consisting of two fixed beams that serves as the sensing element for detecting microwave power. / 一种特定的微机电系统结构，由两个固定梁组成，作为检测微波功率的传感元件。
- Knowledge type
- 物理设备
- First proposed or discovered
- Proposer
- Turkey Farm member
- Creator
- 农场主
- Last updated
- 2026-11-01 17:06:09
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Related literature
ranked by community starsStudy on the Thermal--Mechanical Coupling Effect of Microwave Power Detection Chip Based on MEMS Double Fixed BeamsOpen source
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1 recordsRecord title: MEMS Double Fixed Beams.
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