Microelectronics
微机电系统平台
MEMS platformA micro-electro-mechanical systems (MEMS) platform integrated on-chip for the in situ thermal characterization of CMOS thin films / 一种用于CMOS薄膜原位热表征的片上微机电系统（MEMS）平台
- Knowledge type
- 物理设备
- First proposed or discovered
- Proposer
- Turkey Farm member
- Creator
- 农场主
- Last updated
- 2026-10-26 23:01:29
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Main parameters and performance indicators
CMOS thin films: The target material for thermal characterizationIn situ thermal characterization: The measurement process integrated into the platform
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Related literature
ranked by community starsOn-chip MEMS platform for in situ thermal characterization of CMOS thin filmsOpen source
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1 recordsRecord title: MEMS platform.
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