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Engineering

微机电系统谐振器

MEMS resonators

Micro-Electro-Mechanical Systems (MEMS) resonators are devices that use mechanical oscillations to achieve high frequency stability and sensitivity. / 微机电系统(MEMS)谐振器是利用机械振荡实现高频率稳定性和灵敏度的器件。

Knowledge type
物理设备
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Turkey Farm member
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农场主
Last updated
2026-11-07 16:05:31
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Main parameters and performance indicators

Resonance frequency: The frequency at which the device oscillates with maximum amplitude.Quality factor (Q): A measure of the resonator's ability to store energy and reduce losses.Coupling strength: The degree of interaction between the resonator and the external environment or other resonators.

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Ultra‑weakly coupled tri‑beam MEMS resonators enabling gas sensing via frequency lockingOpen source

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automated knowledge publish农场主2026-11-07 16:05:31

Record title: MEMS resonators.