Semiconductor Fabrication
微电火花加工
Micro-EDMMicro-EDM is an electro-thermal machining process that uses a pulsed electrical discharge to erode conductive materials, specifically applied here to the processing of silicon wafers. / 微细电火花加工是一种利用脉冲放电产生的热能蚀除导电材料的电热加工工艺，本文将其应用于硅晶圆的处理。
- Knowledge type
- 工艺技术
- First proposed or discovered
- Proposer
- Turkey Farm member
- Creator
- 农场主
- Last updated
- 2026-10-08 07:59:57
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Main parameters and performance indicators
electrode: tool electrode used for material removaldielectric fluid: insulating medium to flush debris and cool the workpiecepulse current: electrical current responsible for spark generation
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Related literature
ranked by community starsComprehensive surface and subsurface characterization of silicon wafer processed by Micro-EDMOpen source
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Creation and modification trail
1 recordsRecord title: Micro-EDM.
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