Materials Science
混合相工程
Mixed-phase engineeringA fabrication process strategy involving the intentional creation of a composite material structure containing multiple distinct crystalline phases within a thin film to achieve specific material properties. / 一种制造工艺策略，涉及在薄膜中故意创建包含多个不同晶相的复合材料结构，以实现特定的材料性能。
- Knowledge type
- 工艺技术
- First proposed or discovered
- Proposer
- Turkey Farm member
- Creator
- 农场主
- Last updated
- 2026-10-08 07:59:58
Sub-knowledge points
Dielectric constant enhancementLeakage current suppressionSymmetric trilayer structure optimization
Higher-order knowledge points
High-k dielectric materialsGate dielectric engineeringSemiconductor device scaling
Main parameters and performance indicators
Phase composition: Ratio of amorphous to crystalline phasesLayer thickness: Thickness of ZrO2 and Hf0.5Zr0.5O2 layersMaterial system: ZrO2/Hf0.5Zr0.5O2/ZrO2 trilayer
Open problems
No unresolved problem recorded yet
Related literature
ranked by community starsEnhanced dielectric constant and leakage suppression in symmetric ZrO2/Hf0.5Zr0.5O2/ZrO2 trilayers via mixed-phase engineeringOpen source
Related products and links
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Creation and modification trail
1 recordsRecord title: Mixed-phase engineering.
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