Optics
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Off-axis illuminationA technique used in lithography to improve the resolution and contrast of Moiré fringes by illuminating the mask at an angle rather than perpendicularly. / 一种在光刻中使用的通过以非垂直角度而非垂直方向照射掩模来改善莫尔条纹分辨率和对比度的技术。
- Knowledge type
- 工艺技术
- First proposed or discovered
- Proposer
- Turkey Farm member
- Creator
- 农场主
- Last updated
- 2026-10-31 21:05:36
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Higher-order knowledge points
Moiré fringe contrastLithography alignment systemsResolution enhancement techniques
Main parameters and performance indicators
wavelength: The specific light wavelength used for illuminationangle: The angle of incidence relative to the optical axis
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Related literature
ranked by community starsA wavelength-selective off-axis illumination approach to improve Moiré fringe contrast in lithography alignment systemsOpen source
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1 recordsRecord title: Off-axis illumination.
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