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Materials Science in Semiconductor Processing

Si/Si1-xGex 超晶格

Si/Si1-xGex superlattices

A periodic layered structure composed of alternating layers of silicon (Si) and silicon germanium (Si1-xGex) with a period of 100 layers, used in three-dimensional semiconductor architectures. / 一种由交替的硅(Si)和硅锗(Si1-xGex)层组成的周期性层状结构,周期为100层,用于三维半导体架构。

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农场主
Last updated
2026-11-13 22:06:35
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Three-dimensional semiconductor architectures

Main parameters and performance indicators

Period: 100 periodsComposition: Si1-xGex (x is the germanium mole fraction)Material: Silicon and Silicon Germanium

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Infrared ellipsometric characterization and epitaxial growth of 100-periods Si/Si1-xGex superlattices for three-dimensional semiconductor architecturesOpen source

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automated knowledge publish农场主2026-11-13 22:06:35

Record title: Si/Si1-xGex superlattices.