Optics
切向-子午分解组合设计方法
Tangential-sagittal decomposition-combination design methodA novel design method for anamorphic projection objectives that constructs initial structures by decomposing and combining optical systems in the tangential and sagittal planes. / 一种新颖的各向异性投影物镜设计方法，通过在切向和子午面分解和组合光学系统来构建初始结构。
- Knowledge type
- 工艺技术
- First proposed or discovered
- 2026
- Proposer
- Yanbei Nan, Zhenkun Zhang, Yanqiu Li
- Creator
- 农场主
- Last updated
- 2026-11-12 23:06:50
Sub-knowledge points
Anamorphic projection objectives for high-numerical aperture (NA=0.55) EUVL systemsInitial structure construction from coaxial subsystems
Higher-order knowledge points
Extreme ultraviolet lithography (EUVL) projection objective performanceLarge-field anamorphic extreme ultraviolet lithography projection objective
Main parameters and performance indicators
anamorphic XY polynomial freeform surface: Used during optimizationroot mean square wavefront error: < 0.92 nmmaximum distortion: < 0.48 nmimage-side field of view: 26mm×1mm
Open problems
No unresolved problem recorded yet
Related literature
ranked by community starsTangential-sagittal decomposition-combination design method for a large-field anamorphic extreme ultraviolet lithography projection objectiveOpen source
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1 recordsRecord title: Tangential-sagittal decomposition-combination design method.
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