Materials Science and Engineering
硅阳极微加工策略
Microfabrication Strategies for Silicon AnodesA set of advanced fabrication techniques (e.g., thin-film deposition, photolithography, etching) applied to silicon to create anodes for compact batteries, enabling precise control over geometry and stability / 应用于硅的先进制造技术（如薄膜沉积、光刻、蚀刻），用于制造紧凑型电池的阳极，实现对几何形状和稳定性的精确控制。
- Knowledge type
- 工艺技术
- First proposed or discovered
- Proposer
- Turkey Farm member
- Creator
- 农场主
- Last updated
- 2026-11-12 20:06:52
Sub-knowledge points
Metal-assisted chemical etching / 工艺技术Atomic Layer Deposition / 工艺技术Thin-film depositionPhotolithographyDeep reactive ion etchingNanoimprint lithographyLaser patterningTemplate-assisted growthWafer-level encapsulation
Higher-order knowledge points
On-chip and miniaturized batteriesSilicon anodesLithium-ion batteriesMicroelectromechanical-systems
Main parameters and performance indicators
Areal loading: Mass of active material per unit areaPorosity: Void fraction within the electrodeDiffusion length: Path length for ion transportMechanical compliance: Ability to withstand volume expansion
Open problems
Stable solid-electrolyte interphase formationLoss of electrical contact during cyclingProcess-integration constraints at microscale
Related literature
ranked by community starsMicrofabrication Strategies for Silicon Anodes in On-Chip and Miniaturized BatteriesOpen source
Related products and links
On-chip and miniaturized batteries
Creation and modification trail
1 recordsRecord title: Microfabrication Strategies for Silicon Anodes.
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